The effect of angle of incidence to low damage sputtering of organic polymers using a C60 ion beam

✍ Scribed by Takuya Miyayama; Noriaki Sanada; Shin-ichi Iida; John S. Hammond; Mineharu Suzuki

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 540 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.05.265