𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Bulk micromachined relay with lateral contact

✍ Scribed by Li, Zhihong; Zhang, Dacheng; Li, Ting; Wang, Wei; Wu, Guoying

Book ID
121478179
Publisher
Institute of Physics
Year
2000
Tongue
English
Weight
163 KB
Volume
10
Category
Article
ISSN
0960-1317

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Fabrication of silicon bolometers with b
Fabrication of silicon bolometers with bulk micromachining technology
✍ Faes, A.; Giacomozzi, F.; Margesin, B.; Nucciotti, A. πŸ“‚ Article πŸ“… 2004 πŸ› Elsevier Science 🌐 English βš– 238 KB

Monolithic silicon bolometers with implanted thermistors, micromachined thermal masses and suspension beams have been developed. These devices are intended for accurate b-decay spectrum measurements in the Milano neutrino mass experiment. By means of a dedicated micromachining fabrication process ve

Silicon bulk micromachined electromechan
Silicon bulk micromachined electromechanical switches with four cantilever piezoelectric actuators
✍ Jae Yoeng Park; Hee Chul Lee; Chang Soo Yang πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 312 KB

## Abstract In this article, silicon bulk micromachined RF MEMS switch with four cantilever piezoelectric actuators has been designed, fabricated, and characterized for advanced mobile/wireless communication systems. The proposed switch is comprised of four piezoelectric cantilever actuators, a con