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CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity

✍ Scribed by S. Kal; S. Das; D.K. Maurya; K. Biswas; A. Ravi Sankar; S.K. Lahiri


Book ID
104051109
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
297 KB
Volume
37
Category
Article
ISSN
0026-2692

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