✦ LIBER ✦
A bulk-micromachined bistable relay with U-shaped thermal actuators
✍ Scribed by Jin Qiu, ; Lang, J.H.; Slocum, A.H.; Weber, A.C.
- Book ID
- 121826551
- Publisher
- IEEE
- Year
- 2005
- Tongue
- English
- Weight
- 814 KB
- Volume
- 14
- Category
- Article
- ISSN
- 1057-7157
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