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Brittle Thin Films

✍ Scribed by A. Braides; I. Fonseca

Book ID
105936650
Publisher
Springer
Year
2001
Tongue
English
Weight
163 KB
Volume
44
Category
Article
ISSN
0095-4616

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This paper describes the design and fabrication of a series of test structures for measuring the fracture toughness of brittle thin films, with application to low-pressure chemical-vapor-deposited (LPCVD) Si3N4 and low-stress, silicon-rich LPCVD SixNy. Crack-initiating features are patterned in clam