Brittle fracture of material surface under low-energy ion bombardment

✍ Scribed by A.I. Kalinichenko; V.E. Strel’nitskij

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 410 KB
• Volume: 268
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2010.04.001

✦ Synopsis

A theoretical study is made on thermoelastic stress arising during interaction of a low-energy ion with a solid. The conditions are formulated that are necessary and sufficient for the brittle fracture and cluster sputtering of the material to occur. The sputtering coefficient is determined depending on the ion species and energy and the characteristics of material.