We report on the observation of fast hydrogen atoms in a capacitively coupled RF reactor by optical emission spectroscopy. For the analysis we use the prominent H Ξ± emission line of atomic hydrogen in combination with other lines from molecular hydrogen and argon. Several characteristic emission str
β¦ LIBER β¦
Negative hydrogen ion production by low energy hydrogen atom bombardment of surfaces
β Scribed by W.G. Graham
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 296 KB
- Volume
- 73
- Category
- Article
- ISSN
- 0375-9601
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