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Boundary condition for the interface between silicon and silicon oxide

✍ Scribed by Kim, J. U.; Lee, Hong H.

Book ID
121498934
Publisher
The American Physical Society
Year
2000
Tongue
English
Weight
87 KB
Volume
62
Category
Article
ISSN
1098-0121

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The ability of the semiconductor industry to continue scaling microelectronic devices to ever smaller dimensions (a trend known as Moore's Law) is limited by quantum mechanical effects: as the thickness of conventional silicon dioxide (SiO(2)) gate insulators is reduced to just a few atomic layers,