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Boron nitride films synthesized by RF plasma CVD of borane–ammonia and nitrogen

✍ Scribed by B. Deb; B. Bhattacharjee; A. Ganguli; S. Chaudhuri; A.K. Pal


Book ID
114192923
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
233 KB
Volume
76
Category
Article
ISSN
0254-0584

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