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Boron implantation and epitaxial regrowth studies of 6H SiC

✍ Scribed by N. Nordell; A. Schöner; K. Rottner; P. O. Å. Persson; Q. Wahab; L. Hultman; M. K. Linnarsson; E. Olsson

Book ID: 107457710
Publisher: Springer US
Year: 1998
Tongue: English
Weight: 863 KB
Volume: 27
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-998-0105-4

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