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Chloride-based CVD of 3C-SiC epitaxial layers on 6H(0001) SiC

✍ Scribed by Stefano Leone; Franziska C. Beyer; Anne Henry; Olof Kordina; Erik Janzén

Book ID
112183052
Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
383 KB
Volume
4
Category
Article
ISSN
1862-6254

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