Boltzmann Equation Analysis of the Electron Gas in CF4 Discharge Plasma
✍ Scribed by K. Mašek; L. Láska; R. D'Agostino; F. Cramarossa
- Publisher
- John Wiley and Sons
- Year
- 1987
- Tongue
- English
- Weight
- 318 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0005-8025
No coin nor oath required. For personal study only.
✦ Synopsis
The electron energy distribution function in CF, gas discharge was numerically calculated for density reduced electric field E / N = 15-300 X lO-" Vcm2 using the Boltzmann kinetic equation.
The momentum transfer and vibrational cross-sections were derived from available experimental swarm parameters while the cross-sections for inelastic electron-molecule collisional processes indoded were taken from the literature. The two-term spherical harmor?ic expansion of the distribu-Lion function was used in the calculations.
📜 SIMILAR VOLUMES
The morphology of carbon nanotubes synthesized by arc discharge in a CF 4 gas atmosphere was investigated by scanning electron microscopy and transmission electron microscopy. The electronic properties of these nanotubes were investigated by electron spin resonance. The synthesis conditions in CF 4