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Boltzmann Equation Analysis of the Electron Gas in CF4 Discharge Plasma

✍ Scribed by K. Mašek; L. Láska; R. D'Agostino; F. Cramarossa


Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
318 KB
Volume
27
Category
Article
ISSN
0005-8025

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✦ Synopsis


The electron energy distribution function in CF, gas discharge was numerically calculated for density reduced electric field E / N = 15-300 X lO-" Vcm2 using the Boltzmann kinetic equation.

The momentum transfer and vibrational cross-sections were derived from available experimental swarm parameters while the cross-sections for inelastic electron-molecule collisional processes indoded were taken from the literature. The two-term spherical harmor?ic expansion of the distribu-Lion function was used in the calculations.


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