Boltzmann Equation Analysis of the Elect
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K. Maลกek; L. Lรกska; R. D'Agostino; F. Cramarossa
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Article
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1987
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John Wiley and Sons
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English
โ 318 KB
The electron energy distribution function in CF, gas discharge was numerically calculated for density reduced electric field E / N = 15-300 X lO-" Vcm2 using the Boltzmann kinetic equation. The momentum transfer and vibrational cross-sections were derived from available experimental swarm parameter