Bolometric properties of silicon thin-film structures fabricated by plasmachemical vapor-phase deposition

✍ Scribed by V. Yu. Zerov; Yu. V. Kulikov; V. G. Malyarov; N. A. Feoktistov; I. A. Khrebtov

• Book ID: 110122916
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 1997
• Tongue: English
• Weight: 59 KB
• Volume: 23
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/1.1261722