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Black germanium produced by inductively coupled plasma etching

✍ Scribed by Schicho, Sandra; Jaouad, Abdelatif; Sellmer, Christian; Morris, Denis; Aimez, Vincent; Arès, Richard

Book ID: 122421919
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 439 KB
Volume: 94
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2012.12.014

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