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Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

✍ Scribed by S Guruvenket; G Mohan Rao

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 119 KB
Volume: 106
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2003.09.016

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