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Behaviors of hydrogen in C–SiC films with IR and SIMS analyses

✍ Scribed by N.K. Huang; B. Yang; Q. Xiong; Y.G. Liu; D.Z. Wang; J.R. Lei

Book ID
114166088
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
108 KB
Volume
195
Category
Article
ISSN
0168-583X

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✍ L.W. Wang; B. Yang; D.Z. Wang; N.K. Huang 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 308 KB

70% SiC-C films were prepared with magnetron sputtering deposition followed by Ar + ion bombardment. Hydrogen was then introduced to these films with ion implantation and permeation techniques for a comparison. Infrared (IR) transmission measurements were performed to analyze the hydrogen-related vi