✦ LIBER ✦
Comparative study of trap-limited hydrogen diffusion in amorphous SiC, Si 0.66 C 0.33 N 1.33 , and SiN 1.33 films
✍ Scribed by Schmidt, H; Borchardt, G; Geckle, U; Bruns, M; Baumann, H
- Book ID
- 120940856
- Publisher
- Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 192 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0953-8984
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