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Behavior of oxidation-induced stacking faults in annealed Czochralski silicon doped by nitrogen

✍ Scribed by Yang, Deren; Chu, Jia; Xu, Jin; Que, Duanlin


Book ID
119997381
Publisher
American Institute of Physics
Year
2003
Tongue
English
Weight
556 KB
Volume
93
Category
Article
ISSN
0021-8979

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