✦ LIBER ✦

BedeScan: structural defect detection for semiconductor wafers

Book ID: 104367825
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 39 KB
Volume: 18
Category: Article
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(05)71149-2

No coin nor oath required. For personal study only.

✦ Synopsis

Toshiba has purchased a Vektor X-ray diffraction tool from Accent Optical Technologies, a supplier of lattice engineering and photolithography process control tools. Toshiba will use the tool for DVD laser manufacturing at its Kitakyushu facility.

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