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Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing

✍ Scribed by Dongil Kim; Pilsung Kang; Sungzoon Cho; Hyoung-joo Lee; Seungyong Doh

Book ID: 113607209
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 743 KB
Volume: 39
Category: Article
ISSN: 0957-4174
DOI: 10.1016/j.eswa.2011.09.088

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This volume of Advances in Intelligent and Soft Computing contains accepted papers presented at CISIS 2012 and ICEUTE 2012, both conferences held in the beautiful and historic city of Ostrava (Czech Republic), in September 2012. CISIS aims to offer a meeting opportunity for academic and industry-rel