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A nondestructive automated defect detection system for silicon carbide wafers

✍ Scribed by Toshiro Kubota; Parag Talekar; Xianyun Ma; Tangali S. Sudarshan

Book ID: 105838777
Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 346 KB
Volume: 16
Category: Article
ISSN: 0932-8092
DOI: 10.1007/s00138-004-0169-y

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