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Bayesian reconstruction of surface roughness and depth profiles

✍ Scribed by M. Mayer; R. Fischer; S. Lindig; U. von Toussaint; R.W. Stark; V. Dose

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 527 KB
Volume: 228
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.10.069

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✦ Synopsis

Bayesian data analysis provides a consistent probabilistic theory for the extraction of sample parameters from spectra measured with MeV ion beam analysis methods. The application of Bayesian data analysis is demonstrated on three different examples, namely the deconvolution of the apparatus function for improving the energy resolution of solid state detectors, the reconstruction of depth profiles of individual elements with confidence intervals from Rutherford backscattering measurements, and the reconstruction of surface-roughness distributions using Rutherford backscattering.

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