Bandgap tuning of semiconductor quantum
โ
P.G. Piva; P.J. Poole; S. Charbonneau; E.S. Koteles; M. Buchanan; G. Aers; A.P.
๐
Article
๐
1994
๐
Elsevier Science
๐
English
โ 199 KB
Ion induced QW intermixing using broad area and focused ion beam (FIB) implantation was investigated at low energy ( 32 and \(100 \mathrm{keV}\) respectively) in three different material systems (GaAs/AlGaAs, InGaAs/GaAs, and lattice matched InGaAs/InP). Repeated sequential ion implants and rapid th