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Balance dielectric layer for micro electrostatic switches in the presence of capillary effect

✍ Scribed by Yazdanpanahi, Ebrahim; Noghrehabadi, Aminreza; Ghalambaz, Mohammad

Book ID: 120600937
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 859 KB
Volume: 74
Category: Article
ISSN: 0020-7403
DOI: 10.1016/j.ijmecsci.2013.04.014

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