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[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Effects of Si-nanocrystal formation in dielectric layers on reliability of RF MEMS switches

✍ Scribed by Linxian Zhan, ; Haisheng San, ; Gang Li, ; Peng Xu, ; Xuyuan Chen,

Book ID: 118135416
Publisher: IEEE
Year: 2008
Weight: 354 KB
Volume: 0
Category: Article
ISBN: 1424419077
DOI: 10.1109/nems.2008.4484392

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