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[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - 3D-nanomachining using corner lithography

✍ Scribed by Berenschot, Erwin; Tas, Niels R.; Jansen, Henri V.; Elwenspoek, Miko

Book ID: 118026872
Publisher: IEEE
Year: 2008
Weight: 255 KB
Volume: 0
Category: Article
ISBN: 1424419077
DOI: 10.1109/nems.2008.4484432

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