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Ba2NaNb5O15MgO optical waveguide structure grown on Si wafer by pulsed laser deposition

✍ Scribed by X.L. Guo; Z.G. Liu; S.N. Zhu; S.B. Xiong; Y.Y. Zhu; J.M. Liu


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
317 KB
Volume
167
Category
Article
ISSN
0022-0248

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ZnO thin films with highly c-axis orientation have been fabricated on p-type Si(1 1 1) substrates at 400 8C by pulsed laser deposition (PLD) from a metallic Zn target with oxygen pressures between 0.1 and 0.7 mbar. Experimental results indicate that the films deposited at 0.3 and 0.5 mbar have bette