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Automatic measurement of electron-beam diameter and astigmatism: BEAMETR

✍ Scribed by S. Babin; M. Gaevski; D. Joy; M. Machin; A. Martynov

Publisher
Elsevier
Year
2008
Tongue
English
Weight
662 KB
Volume
1
Category
Article
ISSN
1875-3892

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✦ Synopsis

Beam size is one of the major characteristics of any electron beam system. Accuracy and resolution of SEM and an EBL system directly depend on beam diameter; it should be monitored and tuned frequently. Currently used methods are not accurate and are operator dependent. A technique is described to determine beam size using an automatic procedure. In the developed method, a specially designed and fabricated test pattern is scanned using an e-beam. A spectra of the signal is analyzed; beam diameter is automatically determined using a software program. Results of design, fabrication, and analysis of the beam calibration test pattern are presented.

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The present report illustrates a computerized method for precise measurement of the diameter of an electron beam. The value of this measurement extends beyond simply providing an accurate estimate of resolution. Other salient areas which will benefit include quantitative X-ray microanalysis, energy