✦ LIBER ✦
Metrology-chip for measurement of diameter and astigmatism of an electron beam with nm resolution using moiré amplification
✍ Scribed by H.W.P. Koops; B. Hübner; M. Watanabe
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 364 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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