✦ LIBER ✦
Fabrication of 20 nm patterns for automatic measurement of electron beam size using BEAMETR technique
✍ Scribed by S. Babin; S. Cabrini; S. Dhuey; B. Harteneck; M. Machin; A. Martynov; C. Peroz
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 650 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
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