Automatic focusing of scanning microscopes
โ Scribed by B. Goel; R. Eggmann
- Publisher
- Elsevier Science
- Year
- 1972
- Weight
- 130 KB
- Volume
- 104
- Category
- Article
- ISSN
- 0029-554X
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This paper presents experimental results from a second-order focusing toroidal spectrometer attachment for the scanning electron microscope (SEM). The energy resolution of the spectrometer is measured to be 0.38% for an angular spread of 7 81, close to the numerical simulated value of 0.32% based up
Reflection electron microscopy (REM) is used to calibrate the focusing steps and rotation of electron microscopes. The calibration of focusing steps is done by the direct measurement of the shift on in-focus positions in the REM micrographs. Rotations between the diffraction patterns and images are