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Calibration of focusing steps and image rotation of electron microscopes

✍ Scribed by Hsu, Tung

Publisher
Wiley (John Wiley & Sons)
Year
1987
Tongue
English
Weight
416 KB
Volume
5
Category
Article
ISSN
0741-0581

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✦ Synopsis

Reflection electron microscopy (REM) is used to calibrate the focusing steps and rotation of electron microscopes. The calibration of focusing steps is done by the direct measurement of the shift on in-focus positions in the REM micrographs. Rotations between the diffraction patterns and images are calibrated in the usual way. By using the REM geometry, the reflection high energy electron diffraction (RHEED) patterns and REM images have no rotation symmetry, thus eliminating the 180" uncertainty.

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A calibration sample for transmission electron microscopy (TEM) has been developed that performs the three major instrument calibrations for a transmission electron microscope: the image magnification calibration for measurements of images, the camera constant calibration for indexing diffraction pa