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Auger electron spectroscopy of deposited silane layers

✍ Scribed by J.F Cain; E Sacher

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 161 KB
Volume: 67
Category: Article
ISSN: 0021-9797
DOI: 10.1016/0021-9797(78)90244-8

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