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Auger electron depth profiling of the CrAl2O3 metallization system

✍ Scribed by Hua Lu; Y.D. Cui; J. Qin; C.L. Bao; D.H. Shen


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
961 KB
Volume
103
Category
Article
ISSN
0169-4332

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