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Auger and A–C impedance studies of the R–F sputter deposited Fe2O3 films

✍ Scribed by S.C. Tjong

Book ID
113186564
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
250 KB
Volume
18
Category
Article
ISSN
0025-5408

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We reveal the influence of the deposition conditions on the physical properties of cermet films made of nanometer sized magnetic metal (# ~/~0) and alumina grains. The films were prepared by r.f. cosputtering under two typical base pressures (10 -6 and 10 -7 Torr), using either an argon plasma or an