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Atomistic nitriding processes of titanium thin films due to nitrogen-implantation

✍ Scribed by Y. Kasukabe; S. Nishida; S. Yamamoto; M. Yoshikawa; Y. Fujino

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 849 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.03.191

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