✦ LIBER ✦
Composition of tantalum nitride thin films grown by low-energy nitrogen implantation: a factor analysis study of the Ta 4 fXPS core level
✍ Scribed by A. Arranz; C. Palacio
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 853 KB
- Volume
- 81
- Category
- Article
- ISSN
- 1432-0630
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