Atomic structure and thermal stability of silicon suboxides in bulk thin films and in transition regions at Si–SiO2 interfaces

✍ Scribed by G Lucovsky

• Book ID: 117148739
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 385 KB
• Volume: 227-230
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(98)00014-3