𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Atomic nitrogen generation system for reactive deposition of thin films

✍ Scribed by Marek Sosnowski; Miro Guzinski; Roy Cornely

Book ID
113279785
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
398 KB
Volume
37-38
Category
Article
ISSN
0168-583X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Dual-magnetron open field sputtering sys
Dual-magnetron open field sputtering system for sideways deposition of thin films
✍ Asim Aijaz; Daniel Lundin; Petter Larsson; Ulf Helmersson πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 681 KB

A dual-magnetron system for deposition inside tubular substrates has been developed. The two magnetrons are facing each other and have opposing magnetic fields forcing electrons and thereby also ionized material to be transported radially towards the substrate. The depositions were made employing di