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Atomic mixing and interface reactions in Ta/Si bilayers during noble-gas ion irradiation

✍ Scribed by Dhar, S.; Milosavljevic, M.; Bibic, N.; Lieb, K. P.

Book ID: 121658342
Publisher: The American Physical Society
Year: 2001
Tongue: English
Weight: 107 KB
Volume: 65
Category: Article
ISSN: 1098-0121
DOI: 10.1103/PhysRevB.65.024109

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