✦ LIBER ✦

Atomic Layer Epitaxy of Copper on Tantalum

✍ Scribed by Dr. Per Mårtensson; Prof. Jan-Otto Carlsson

Publisher: John Wiley and Sons
Year: 1997
Tongue: English
Weight: 633 KB
Volume: 3
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.19970030107

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Layered tantalum-aluminum oxide films de

Layered tantalum-aluminum oxide films deposited by atomic layer epitaxy

✍ H. Kattelus; M. Ylilammi; J. Saarilahti; J. Antson; S. Lindfors 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 223 KB

Deposition and etching of tantalum oxide

Deposition and etching of tantalum oxide films in atomic layer epitaxy process

✍ Jaan Aarik; Aleks Aidla; Kaupo Kukli; Teet Uustare 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 240 KB

Atomic layer epitaxy of germanium

✍ Satoshi Sugahara; Takuya Kitamura; Shigeru Imai; Masakiyo Matsumura 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 836 KB

Atomic layer epitaxy (ALE) on porous sub

Atomic layer epitaxy (ALE) on porous substrates

✍ Eeva-Liisa Lakomaa 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 935 KB

4th International Conference on Atomic L

4th International Conference on Atomic Layer Epitaxy

✍ Mohamed Henini 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 926 KB

## The 4th International Conference on Atomic Layer Epitaxy (ALE) was he/d at the Johannes Kepler University of Linz, Austria on the 29 -31 July 1996. There were 13 countries represented at the meeting. The number of participants was around 60 from which a significant number of Japanese and Finnis

Atomic layer epitaxy of CdTe on GaAs, by

Atomic layer epitaxy of CdTe on GaAs, by organometallic vapor phase epitaxy

✍ W.S. Wang; H.E. Ehsani; I.B. Bhat 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 642 KB