Atomic Layer Deposition (Principles, Characteristics, and Nanotechnology Applications) || ALD Applications and Industry

✍ Scribed by Kääriäinen, Tommi; Cameron, David; Kääriäinen, Marja-Leena; Sherman, Arthur

• Book ID: 120413235
• Publisher: John Wiley & Sons, Inc.
• Year: 2013
• Weight: 531 KB
• Category: Article
• ISBN: 1118062779
• DOI: 10.1002/9781118747407.ch8