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Atomic Layer Deposition (Principles, Characteristics, and Nanotechnology Applications) || Fundamentals of Atomic Layer Deposition

✍ Scribed by Kääriäinen, Tommi; Cameron, David; Kääriäinen, Marja-Leena; Sherman, Arthur

Book ID: 120412614
Publisher: John Wiley & Sons, Inc.
Year: 2013
Weight: 627 KB
Category: Article
ISBN: 1118062779
DOI: 10.1002/9781118747407.ch1

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Intended To Update Scientists And Engineers On The Current State Of The Art In A Variety Of Key Techniques Used Extensively In The Fabrication Of Structures At The Nanoscale. The Present Work Covers The Essential Technologies For Creating Sub 25 Nm Features Lithographically, Depositing Layers With N