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Atomic Layer Deposition (Principles, Characteristics, and Nanotechnology Applications) || Elemental Semiconductor Epitaxial Films

✍ Scribed by Kääriäinen, Tommi; Cameron, David; Kääriäinen, Marja-Leena; Sherman, Arthur


Book ID
120412615
Publisher
John Wiley & Sons, Inc.
Year
2013
Weight
368 KB
Category
Article
ISBN
1118062779

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