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Atomic Layer Deposition of Metal Tellurides and Selenides Using Alkylsilyl Compounds of Tellurium and Selenium

✍ Scribed by Pore, Viljami; Hatanpää, Timo; Ritala, Mikko; Leskelä, Markku

Book ID
127127354
Publisher
American Chemical Society
Year
2009
Tongue
English
Weight
397 KB
Volume
131
Category
Article
ISSN
0002-7863

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