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Atomic Layer Deposition of Ferroelectric Bismuth Titanate Bi 4 Ti 3 O 12 Thin Films

✍ Scribed by Vehkamäki, Marko; Hatanpää, Timo; Kemell, Marianna; Ritala, Mikko; Leskelä, Markku

Book ID: 125944515
Publisher: American Chemical Society
Year: 2006
Tongue: English
Weight: 631 KB
Volume: 18
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm060966v

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