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Atomic Layer Deposition of Al 2 O 3 Thin Films from a 1-Methoxy-2-methyl-2-propoxide Complex of Aluminum and Water

✍ Scribed by Min, Yo-Sep; Cho, Young Jin; Hwang, Cheol Seong

Book ID: 126046589
Publisher: American Chemical Society
Year: 2005
Tongue: English
Weight: 119 KB
Volume: 17
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm048649g

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