Atomic Layer Deposition of Hafnium Dioxide Films Using Hafnium Bis(2-butanolate)bis(1-methoxy-2-methyl-2-propanolate) and Water

✍ Scribed by K. Kukli; M. Ritala; M. Leskelä; T. Sajavaara; J. Keinonen; A.C. Jones; J.L. Roberts

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 298 KB
• Volume: 9
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200306263