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Atomic layer deposition for nanofabrication and interface engineering

✍ Scribed by Liu, Monan; Li, Xianglin; Karuturi, Siva Krishna; Tok, Alfred Iing Yoong; Fan, Hong Jin

Book ID
111689710
Publisher
The Royal Society of Chemistry
Year
2012
Tongue
English
Weight
583 KB
Volume
4
Category
Article
ISSN
2040-3364

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